TY  - BOOK
AU  - Mahalik,Nitaigour Premchand
TI  - MEMS
SN  - 9780070634459
U1  - 621.381 
PY  - 2007///
CY  - New Delhi
PB  - Tata McGraw-Hill
KW  - Electronics
KW  - Microelectromechanical systems
KW  - Nonatechnology
ER  -